| Oil or Not: | Oil Free |
|---|---|
| Structure: | Grease Lubrication and Ceramic Bearing |
| Vacuum Degree: | High Vacuum |
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| Type | FF-200/1300E FF200/1300FE | ||
| Flange(In) | DN200 CF/ISO-K | Gas Throughout (sccm) | N2:2500 |
| Flange(Out) KF | DN40 | He:1850 | |
| Pumping Speed( L/s) | N2:1300 | H2:1450 | |
| He:1000 | Ar:950 | ||
| H2:480 | Rotation Speed ( rpm) | 24000 | |
| Ar:1250 | Run-Up Time(min) | ≤9 | |
| Compression Ratio | N2:109 | Cooling Type,Standard | Water, air(optional) |
| He:104 | Cooling Water Consumption ( L/min) | ≥1 | |
| H2:103 | Cooling Water Temperature(ºC) | ≤25 | |
| Ar:109 | Power Connection:Voltage (V AC) | DC24/AC220 | |
| Ultimated Pressure(Pa) | CF:6×10-7 | Max.Power Consumption (W) | ≤500 |
| ISO-K:6×10-6 | Controller Model | TCDP-II | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 | Weight (kgs) | 29(LF) 31(CF) |
| Max. Fore-vacuum Pressure | N2:600 | Controller | TCDP-II |
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