| Oil or Not: | Oil |
|---|---|
| Structure: | Rotary Vacuum Pump |
| Exhauster Method: | Entrapment Vacuum Pump |
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| Turbo Pump Speed (l/s) | 110 | Turbo Pump Bearing Type | Ceramic |
| Inlet Flange | DN100 LF , DN100 CF | Lubrication | Oil |
| Outlet Flange | KF 25 (DN) | Rotation Speed (rpm) | 42300 |
| Compression Ratio | N2: 108; H2: 5×102 | Run-Up time (min) | < 3 |
| Ultimate Vacuum (Torr) | ≤ 4.5×10-8 (DN 100 LF) | Cooling Method | water / air |
| ≤ 4.5×10-9 (DN 100CF) | Backing Pump | RVP-4 Rotary Pump | |
| Ultimate Vacuum(Pa) | ≤ 6×10-6 (DN 100 LF) | D×W×H(mm) | 500×510×685 |
| ≤ 6×10-7 (DN 100 CF) | Weight | 52 k |
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