KYKY-EM8200 ultra-high resolution field emission scanning electron microscope with new electro-optical design. It is based on the deceleration sample stage, a new generation of low aberration objective lens, Inlens detector and other technologies, and integrates extensive image processing functions, which provides new solutions for users in new energy, semiconductor and other industries.
Resolution:0.8nm@15kV,1.5nm@1kV
Magnification:1x-3000000x
Optical Magnification 1x-100x
Electron Gun:Schottky Field Emission Gun
Acceleration Voltage:0.2kV-30kV
Vacuum System:1 Sputter Ion Pump, 1 Getter Ion Combined Pump, 1 Turbo Molecular Pump, 1 Mechanical Pump
Detector Configurations
• High Vacuum Secondary Electron Detector
• Semiconductor Four segmentation Backscatter Detector
• Infrared CCD Camera
• Inlens Detector
Sample Stage
Five-axis Automatic Large Sample Stage
• X=150mm
• Y=150mm
• Z=65mm
• T=-10°~+90°
• R=360°
Sample Specifications
Maximum Sample Diameter: Ф320mm
Maximum Sample Height: 90mm
Optional Accessories
EDS/EBSD/STEM/CL/LoadLock Transition Chamber /Heating Stage / Cooling Stage / Tensile Stage, etc.
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