| Customization: | Available |
|---|---|
| Oil or Not: | Oil |
| Structure: | Rotary Vacuum Pump |
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| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:600 |
| He:380 | |
| H2:240 | |
| Ar:580 | |
| Compression Ratio | N2:109 |
| He:105 | |
| H2:104 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-8 |
| ISO-K:6×10-7 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 |
| Max. Fore-vacuum Pressure | N2:350 |
| Gas Throughout (sccm) | N2:1200 |
| He:880 | |
| H2:700 | |
| Ar:450 | |
| Rotation Speed ( rpm) | 36000 |
| Run-Up Time(min) | ≤9 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(ºC) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
| Weight (kgs) | 29(LF) 30.5(CF) |
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