| Oil or Not: | Oil Free |
|---|---|
| Structure: | Maglev Pump |
| Exhauster Method: | Entrapment Vacuum Pump |
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| Model | CXF-320/3001 |
| Pump Speed(l/s,Air) | 3200 |
| Compression Ratio | >1×108 |
| Ultimate Vacuum(Pa) | ≤5×10-7 |
| Inlet Flange | ISO-F 320 |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 24000 |
| Run-up Time(min) | 12 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Communication | Rs485 |
| Weight(kg)(With Controller onboard) | 75 |
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