| Customization: | Available |
|---|---|
| Oil or Not: | Oil |
| Structure: | Rotary Vacuum Pump |
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| F-400/3500 BE | |||
| Flange(In) | DN400 ISO-K | Gas Throughout (sccm) | N2:5500 |
| Flange(Out) KF | DN100 | He:4000 | |
| Pumping Speed( L/s) | N2:3500 | H2:3200 | |
| He:2650 | Ar:2100 | ||
| H2:1280 | Rotation Speed ( rpm) | 13500 | |
| Ar:3200 | Run-Up Time(min) | ≤18 | |
| Compression Ratio | N2:108 | Cooling Type,Standard | Water |
| He:103 | Cooling Water Consumption ( L/min) | ≥1 | |
| H2:102 | Cooling Water Temperature(ºC) | ≤25 | |
| Ar:108 | Power Connection:Voltage (V AC) | DC24/AC220 | |
| Ultimated Pressure(Pa) | 6×10-6 | Max.Power Consumption (W) | ≤1100 |
| Max. Continuous Fore-vacuum pressure(Pa) | 100 | Controller Model | FD-III |
| Max. Fore-vacuum Pressure | N2:300 | Weight (kgs) | 130 |
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