| Oil or Not: | Oil Free |
|---|---|
| Structure: | Ceramic Bearing , Grease Lubrication |
| Vacuum Degree: | High Vacuum |
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| Flange(In) | ISO-K/CF 250, ISO-F (customized) |
| Flange(Out) KF | DN50 |
| Pumping Speed( L/s) | N2:2000 |
| He:1600 | |
| H2:740 | |
| Ar:1900 | |
| Compression Ratio | N2: 108 |
| He:104 | |
| H2:103 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-7 |
| ISO-K:6×10-6 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 200 |
| Max. Fore-vacuum Pressure | N2:650 |
| Gas Throughout (sccm) | N2:3200 |
| He:2400 | |
| H2:1850 | |
| Ar:1200 | |
| Rotation Speed ( rpm) | 24000 |
| Run-Up Time(min) | ≤9 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(ºC) | ≤25 |
| Power Connection:Voltage (V AC) | DC24/AC220 |
| Max.Power Consumption (W) | ≤750 |
| Controller Model | TCDP-II |
| Weight (kgs) | 32(LF) 35(CF) |
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