Customization: | Available |
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Sample Type: | Solidity |
Processing Method: | Coating |
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SBC-12 DC ion sputter coater | |
Sputtering Target | Au (Standard target),φ58mm |
Glass chamber | Inner diameter φ100 mm x height 130 mm |
Standard sample stage | Inner diameter Ф 40 mm, It can be loaded with 12 SEM φ13 sample holders |
Operation method | Manually |
Sputtering method | DC sputtering |
Vacuum system | Direct-connected rotary vane vacuum pump, 1L/s |
Vacuum detection | pitometer |
Vacuum protection | 20Pa, equipped with a micro-inflation valve to adjust the working vacuum |
Working medium gas | air or argon, equipped with a dedicated argon inlet and micro-inflation adjustment. |
Warranty | One year |