Customization: | Available |
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Warranty: | 1 Year After Sales |
Structure: | Oil Free |
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Flange(In) | ISO-K/CF100 | Max. Fore-vacuum Pressure | N2:500 |
Flange(Out) KF | DN25 | Gas Throughout (sccm) | N2:135 |
Pumping Speed( L/s) | N2:140 | He:80 | |
He:130 | H2:52 | ||
H2:75 | Ar:143 | ||
Ar:145 | Rotation Speed ( rpm) | 51000 | |
Compression Ratio | N2:107 | Run-Up Time(min) | ≤3 |
He:103 | Cooling Type,Standard | Water or Air | |
H2:103 | Cooling Water Consumption ( L/min) | no less than 1 | |
Ar:107 | Cooling Water Temperature(ºC) | ≤25 | |
Ultimate Pressure(Pa) | CF:6×10-7 | Power Connection:Voltage (V AC) | DC24/AC220 |
ISO-K:6×10-6 | Max.Power Consumption (W) | 90 | |
Max. Continuous Fore-vacuum pressure(Pa) | 220 | Controller Model | TCP-100 |