Turbo Molecular Pump

• Warranty: 1 Year After Sales
• Oil or Not: Oil Free
• Structure: Rotary Vacuum Pump
• Model NO.: FF-63/80 series
• Exhauster Method: Positive Displacement Pump
• Vacuum Degree: High Vacuum
• Work Function: Mainsuction Pump
• Working Conditions: Dry
• Transport Package: Polywood Box
• Specification: 62L or 82L/S, water or air cooling, 8*E-7Pa ( CF)
• Trademark: KYKY
• Origin: China
• HS Code: 8414100090

Product Description

Turbo Molecular Pump , FF-63/80E or FF63/80HVE with integrated Drive module , Water/Air cooling , Grease lubrication ,
Advantages:
1. Compact structure for system integration
2. Module design for more selections
3. Higher fore-pressure tolerance
4. Any mounting position

Flange(In)	ISO-K/CF63	Max. Fore-vacuum Pressure	N2:1500
Flange(Out) KF	DN16	Gas Throughout (sccm)	N2:35
Pumping Speed( L/s)	N2:62/82		He:30
	He:55		H2:19
	H2:34		Ar:38
	Ar:65	Rotation Speed ( rpm)	72000
Compression Ratio	N2:10^9	Run-Up Time(min)	≤2
	He:10^5	Cooling Type,Standard	Water or Air
	H2:10^4	Cooling Water Consumption ( L/min)	1
	Ar:10^9	Cooling Water Temperature(ºC)	≤25
Ultimated Pressure(Pa)	CF:5×10^-6	Power Connection:Voltage (V AC)	DC24/AC220
	ISO-K:3×10^-5	Max.Power Consumption (W)	90
Max. Continuous Fore-vacuum pressure(Pa)	500/200	Controller Model	TCP-100